000 00301nam a2200121Ia 4500
008 190812s9999 xx 000 0 und d
020 _a9780070487093
100 _a"Hsu, Tai-Ran"
245 0 _aMEMS & Microsystems design & Manfucature
260 _bMc Graw Hil Education
365 _b750
942 _cBK
999 _c6159
_d6159